Spectroscopic Ellipsometry and Reflectometry - A Users Guide
Most useful book on this subject I have ever read.
Book on SE
A good follow up on Tompkins "A user's guide to Ellipsometry". This book deals with Spectroscopic Ellipsometry, but also covers the basics of single-wavelength ellipsometry. The book covers analysis of Thermal Oxide, PECVD SiO, SiO2, SiN, a-Si, etc. It also covers the mathematics behind the Lorentz oscillator, used in SE layer modelling.
About Spectroscopic Ellipsometry and Reflectometry: A User's Guide detail
- Amazon Sales Rank: #1103273 in Books
- Published on: 1999-03-04
- Original language: English
- Number of items: 1
- Binding: Hardcover
- 248 pages
Spectroscopic Ellipsometry and Reflectometry: A User's Guide Description
While single wave ellipsometry has been around for years, spectroscopic ellipsometry is fast becoming the method of choice for measuring the thickness and optical properties of thin films. This book provides the first practical introduction to spectroscopic ellipsometry and the related techniques of reflectometry. A guide for practitioners and researchers in a variety of disciplines, it addresses a broad range of applications in physics, chemistry, electrical engineering, and materials science.